Brooks 002-1600-25 27-126341-00晶圆传输机器人 PDF资料
1.产 品 资 料 介 绍:
中文资料:
Brooks Automation 002-1600-25 或 27-126341-00 是晶圆传输机器人,广泛应用于半导体制造过程。此类机器人以其高精度、可靠性和效率著称,能够在真空或受控环境中精确移动半导体晶圆。
以下是 Brooks 晶圆传输机器人的一些关键特点:
高精度:机器人能够实现高精度的晶圆摆放,对于半导体制造过程中保持晶圆的完整性和对齐性至关重要。
洁净室兼容性:设计用于在洁净室环境中运行,降低污染风险,确保晶圆质量不受影响。
真空兼容性:这些机器人可以在真空环境中工作,适合半导体制造中需要高度控制的气氛条件。
高可靠性:Brooks 的晶圆传输机器人以其稳定和长寿命的操作而闻名,能够减少停机时间并提高生产效率。
快速传输:具备快速而精准的晶圆传输能力,能够提升生产线的整体效率。
Brooks Automation 的晶圆传输机器人被广泛应用于晶圆处理设备中,适合多种半导体制造步骤,包括光刻、刻蚀、沉积等工艺。
英文资料:
Brooks Automation 002-1600-25 or 27-126341-00 is a wafer transfer robot widely used in semiconductor manufacturing processes. This type of robot is known for its high precision, reliability, and efficiency, capable of accurately moving semiconductor wafers in vacuum or controlled environments.
Here are some key features of Brooks wafer transfer robots:
High precision: Robots can achieve high-precision wafer placement, which is crucial for maintaining the integrity and alignment of wafers in the semiconductor manufacturing process.
Cleanroom compatibility: Designed to operate in a cleanroom environment, reducing contamination risks and ensuring wafer quality is not affected.
Vacuum compatibility: These robots can work in a vacuum environment, suitable for highly controlled atmosphere conditions in semiconductor manufacturing.
High reliability: Brooks' wafer transfer robots are known for their stable and long-lasting operation, which can reduce downtime and improve production efficiency.
Fast transfer: With the ability to transfer wafers quickly and accurately, it can improve the overall efficiency of the production line.
Brooks Automation's wafer transfer robots are widely used in wafer processing equipment, suitable for various semiconductor manufacturing steps, including photolithography, etching, deposition, and other processes.
2.产 品 展 示
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