AGILENT 5517C激光头 PDF资料
1.产 品 资 料 介 绍:
中文资料:
AGILENT 5517C 激光头是一款高精度的激光干涉仪系统部件,常用于精密测量和定位系统中。它是 AGILENT(现为 Keysight Technologies)的 5517 系列激光干涉仪系统的一部分,广泛应用于精密机械、半导体制造、以及计量等高要求的测量领域。
主要特点:
高精度测量:
- 5517C 激光头基于激光干涉原理,能够提供亚纳米级别的高精度位置、距离和速度测量,非常适合精密加工和制造行业。
稳定性强:
- 该激光头具有出色的光束稳定性,即使在长时间运行中也能保证测量的精度和一致性,适合需要高稳定性的工业场合。
高频输出:
- AGILENT 5517C 提供高频稳定激光输出,使其在动态测量和高精度定位中表现尤为突出。
低温漂设计:
- 该激光头对环境温度的敏感性较低,即使在温度变化的情况下,也能保持测量精度,提升了系统的可靠性。
集成化设计:
- 设计紧凑,便于与其他设备集成,如坐标测量机(CMM)、半导体刻蚀设备和其他高精度仪器,节省空间并简化系统构建。
应用场景:
- 半导体制造:用于光刻机等半导体设备中的精密定位和测量。
- 精密机床:用于机床的实时定位和尺寸测量,确保加工精度。
- 计量学:应用于国家和企业实验室中的精密计量系统。
- 光学设备校准:用于光学系统和其他精密设备的校准和测试。
AGILENT 5517C 激光头因其高精度和稳定性,广泛应用于需要极高测量精度的场合,是精密测量和控制系统中的核心组件。
英文资料:
AGILENT 5517C laser head is a high-precision laser interferometer system component commonly used in precision measurement and positioning systems. It is part of AGILENT's (now Keysight Technologies) 5517 series laser interferometer system, widely used in high demand measurement fields such as precision machinery, semiconductor manufacturing, and metrology.
Main features:
High precision measurement:
The 5517C laser head is based on the principle of laser interference and can provide high-precision position, distance, and velocity measurements at the sub nanometer level, making it very suitable for precision machining and manufacturing industries.
Strong stability:
This laser head has excellent beam stability, ensuring measurement accuracy and consistency even during long-term operation, making it suitable for industrial applications that require high stability.
High frequency output:
AGILENT 5517C provides high-frequency stable laser output, making it particularly outstanding in dynamic measurement and high-precision positioning.
Low temperature float design:
The laser head has low sensitivity to environmental temperature, and can maintain measurement accuracy even under temperature changes, improving the reliability of the system.
Integrated design:
Compact design, easy to integrate with other devices such as coordinate measuring machines (CMM), semiconductor etching equipment, and other high-precision instruments, saving space and simplifying system construction.
Application scenarios:
Semiconductor manufacturing: used for precise positioning and measurement in semiconductor equipment such as lithography machines.
Precision machine tools: used for real-time positioning and dimensional measurement of machine tools to ensure machining accuracy.
Metrology: Precision metrology systems applied in national and corporate laboratories.
Optical equipment calibration: used for calibration and testing of optical systems and other precision equipment.
The AGILENT 5517C laser head is widely used in applications that require extremely high measurement accuracy due to its high precision and stability, and is a core component in precision measurement and control systems.
2.产 品 展 示
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